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Winwon Chips
The High Quality 10-20000Nm3/H Volatile Bases Removal Clean Dry Air Purification Device is designed for Point Of Use applications across various industrial sectors. It consists of process pipelines and an advanced electronic control system. The integrated PLC manages the operation of process valves, ensuring a safe, stable, and continuous supply of ultra-pure gas.
| Parameter | Specifications (WP10-A) |
|---|---|
| Purifiable Gases | CDA (Clean Dry Air) |
| Purification Process | Adsorption |
| H2O Level | < 0.1 ppb |
| Volatile Acids (VA) | < 10 ppt |
| Volatile Bases (VB) | < 10 ppt |
| Refractory Compounds (RC) | < 10 ppt |
| Total Organic Carbon (TOC) | < 10 ppt |
| Particle Control | ≤1pcs/m3 (>0.003μm) |
| Standard Flow Rate | 10-20000 Nm3/h |
IC Manufacturing
Semiconductors
Silicon Wafer Production
Panel & Display
Optical Fiber Preform
Solar Cell Production
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UHP & Mixed Gas Production